Open AccessSimulation of a large size inductively coupled plasma generator and comparison with experimental data
Author(s) -
Fan Lei,
Xiaoping Li,
Yanming Liu,
Donglin Liu,
Min Yang,
Yuanyuan Yu
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5016354
Subject(s) - argon , plasma , inductively coupled plasma , computational physics , generator (circuit theory) , electron , trajectory , plasma parameters , atomic physics , mechanics , physics , materials science , power (physics) , thermodynamics , nuclear physics , astronomy
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