Open AccessThe influence of gas pressure on E↔H mode transition in argon inductively coupled plasmas
Author(s) -
Xiao Zhang,
Zhongkai Zhang,
Jinxiang Cao,
Yu Liu,
Pengcheng Yu
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5012560
Subject(s) - atomic physics , plasma , ionization , inductively coupled plasma , electron density , argon , electron , metastability , transition point , intensity (physics) , chemistry , analytical chemistry (journal) , materials science , ion , optics , physics , thermodynamics , organic chemistry , quantum mechanics , chromatography
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