Open AccessReview of inductively coupled plasmas: Nano-applications and bistable hysteresis physics
Author(s) -
HyoChang Lee
Publication year - 2018
Publication title -
applied physics reviews
Language(s) - English
Resource type - Journals
ISSN - 1931-9401
DOI - 10.1063/1.5012001
Subject(s) - bistability , plasma , hysteresis , inductively coupled plasma , materials science , nanotechnology , physics , optoelectronics , computational physics , atomic physics , condensed matter physics , nuclear physics
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