Open AccessA simplified focusing and astigmatism correction method for a scanning electron microscope
Author(s) -
Yihua Lu,
Xianmin Zhang,
Hai Li
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5009683
Subject(s) - fast fourier transform , astigmatism , optics , ellipse , scanning electron microscope , resolution (logic) , computer science , fourier transform , computer vision , artificial intelligence , physics , mathematics , algorithm , geometry , quantum mechanics
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