Open AccessAsymmetric line edge roughness of multilayer grating reference materials
Author(s) -
Xingrui Wang,
Xinbin Cheng,
Longfei Zhang,
Deng Xiao,
Tongbao Li
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5009513
Subject(s) - materials science , grating , x ray reflectivity , surface finish , bilayer , substrate (aquarium) , optics , layer (electronics) , diffusion , surface roughness , enhanced data rates for gsm evolution , ellipsometry , silicon , optoelectronics , composite material , thin film , nanotechnology , chemistry , physics , telecommunications , biochemistry , oceanography , membrane , geology , computer science , thermodynamics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom