Features of structural changes in the near-surface aluminum layer under various schemes of ion implantation
Author(s) -
Д. С. Крыжевич,
Konstantin Zolnikov,
Aleksandr V. Korchuganov
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5007584
Subject(s) - crystallite , materials science , irradiation , grain boundary , crystallization , stacking , surface layer , ion , molecular dynamics , crystallography , aluminium , stacking fault , chemical physics , atom (system on chip) , layer (electronics) , microstructure , composite material , chemical engineering , chemistry , metallurgy , dislocation , computational chemistry , physics , organic chemistry , computer science , nuclear physics , embedded system , engineering
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