Open AccessStudy of oxidation processes in Mo/Be multilayers
Author(s) -
A. N. Nechay,
Н. И. Чхало,
М. Н. Дроздов,
С. А. Гарахин,
D. E. Pariev,
В. Н. Полковников,
Н. Н. Салащенко,
М. В. Свечников,
Yu. A. Vainer,
E. Meltchakov,
Franck Delmotte
Publication year - 2018
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5007008
Subject(s) - extreme ultraviolet lithography , annealing (glass) , materials science , reflectivity , ultraviolet , extreme ultraviolet , oxygen , oxidation process , analytical chemistry (journal) , chemical engineering , optics , optoelectronics , chemistry , metallurgy , environmental chemistry , laser , physics , organic chemistry , engineering
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