Open AccessHeating power at the substrate, electron temperature, and electron density in 2.45 GHz low-pressure microwave plasma
Author(s) -
Abderrahmane Kais,
Juslan Lo,
L. Thérèse,
Ph. Guillot
Publication year - 2018
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/1.5005592
Subject(s) - plasma , electron temperature , physics , atomic physics , electron , langmuir probe , electron density , microwave , plasma parameters , substrate (aquarium) , plasma diagnostics , plasma parameter , oceanography , geology , quantum mechanics
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