Open AccessResearch and preparation of ultra purity silicon tetrachloride
Author(s) -
Ye Wan,
Xiong Zhao,
Dazhou Yan,
Dian Yang,
Yunhao Li,
Shuhu Guo
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5005228
Subject(s) - silicon tetrachloride , impurity , raw material , silicon , materials science , hydrogen , metal , process engineering , chemistry , metallurgy , organic chemistry , engineering
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