Open AccessSoft nanoimprint lithography on SiO2 sol-gel to elaborate sensitive substrates for SERS detection
Author(s) -
Frédéric Hamouda,
Jean-François Bryche,
A. Aassime,
Emmanuel Maillart,
Valentin Gâté,
Silvia Zanettini,
Jérémy Ruscica,
Daniel Turover,
B. Bartenlian
Publication year - 2017
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5004122
Subject(s) - nanoimprint lithography , materials science , nanotechnology , soft lithography , raman scattering , lithography , fabrication , nanostructure , biosensor , nanolithography , pdms stamp , raman spectroscopy , annealing (glass) , sol gel , thin film , optoelectronics , optics , composite material , medicine , alternative medicine , physics , pathology
This paper presents a new alternative fabrication of biochemical sensor based on surface enhanced Raman scattering (SERS) by soft nanoimprint lithography (S-NIL) on SiO2 sol-gel. Stabilization of the sol-gel film is obtained by annealing which simplifies the manufacturing of these biosensors and is compatible with mass production at low cost. This detector relies on a specific pattern of gold nanodisks on a thin gold film to obtain a better sensitivity of molecules’ detection. Characterizations of SERS devices were performed on a confocal Raman microspectrophotometer after a chemical functionalization. We report a lateral collapse effect on poly(diméthylsiloxane) (PDMS) stamp for specific nanostructure dimensions. This unintentional effect is used to evaluate S-NIL resolution in SiO2 sol-gel
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