Open AccessProtective amorphous carbon coatings on glass substrates
Author(s) -
Kaspars Siliņš,
Hana Baránková,
L. Bárdoš
Publication year - 2017
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5002091
Subject(s) - materials science , cathode , graphite , amorphous solid , carbon fibers , amorphous carbon , deposition (geology) , composite material , carbon film , acetylene , chemical vapor deposition , metallurgy , thin film , nanotechnology , composite number , crystallography , chemistry , paleontology , organic chemistry , sediment , biology
Thick amorphous carbon films were deposited by the Magnets-in-Motion (M-M) rf linear hollow cathode at varying acetylene contents in Ar in a hybrid PVD/PE-CVD process directly on glass substrates. The hollow cathode plates manufactured from graphite were used as the PVD target. The measurements show that the films can reach thickness of up to 50 μm at deposition rates of up to 2.5 μm/min. Scratch test measurements confirm that well adhering films several μm thick can be achieved at C2H2 contents of up to 0.5%
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