Open AccessElectron kinetics in capacitively coupled plasmas modulated by electron injection
Author(s) -
Ya Zhang,
Yanli Peng,
Maria Elena Innocenti,
Wei Jiang,
Hongyu Wang,
Giovanni Lapenta
Publication year - 2017
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5001892
Subject(s) - atomic physics , electron , plasma , electron temperature , ionization , argon , chemistry , materials science , ion , physics , organic chemistry , quantum mechanics
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