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Multi-planar amorphous silicon photonics with compact interplanar couplers, cross talk mitigation, and low crossing loss
Author(s) -
Jeff Chiles,
Sonia Buckley,
Nima Nader,
Sae Woo Nam,
Richard P. Mirin,
Jeffrey M. Shainline
Publication year - 2017
Publication title -
apl photonics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.094
H-Index - 34
ISSN - 2378-0967
DOI - 10.1063/1.5000384
Subject(s) - photonics , planar , resonator , waveguide , materials science , silicon photonics , optoelectronics , neuromorphic engineering , wafer , routing (electronic design automation) , nanophotonics , optics , silicon , physics , computer science , electronic engineering , engineering , artificial neural network , computer graphics (images) , machine learning
We propose and experimentally demonstrate a photonic routing architecture that canefficiently utilize the space of multi-plane (3D) photonic integration. A wafer with threeplanes of amorphous silicon waveguides was fabricated and characterized, demonstrating<3×10−4dB loss per out-of-plane waveguide crossing,0.05±0.02dB per interplane coupler, and microring resonators onthree planes with a quality factors up to 8.2×104. We also explore a phase velocity mapping strategy tomitigate the cross talk between co-propagating waveguides on different planes. Theseresults expand the utility of 3D photonic integration for applications such as opticalinterconnects, neuromorphic computing and optical phased arrays

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