Highly conformal and high-ionic conductivity thin-film electrolyte for 3D-structured micro batteries: Characterization of LiPON film deposited by MOCVD method | Zendy

Takashi Fujibayashi | Zendy; Yūsuke Kubota | Zendy; Katsuhiko Iwabuchi | Zendy; Naoki Yoshii | Zendy

Open Access

Highly conformal and high-ionic conductivity thin-film electrolyte for 3D-structured micro batteries: Characterization of LiPON film deposited by MOCVD method

Author(s) -

Takashi Fujibayashi,

Yūsuke Kubota,

Katsuhiko Iwabuchi,

Naoki Yoshii

Publication year - 2017

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4999915

Subject(s) - metalorganic vapour phase epitaxy , materials science , thin film , lithium (medication) , electrolyte , substrate (aquarium) , chemical vapor deposition , ionic conductivity , analytical chemistry (journal) , chemical engineering , optoelectronics , nanotechnology , electrode , chemistry , layer (electronics) , epitaxy , chromatography , endocrinology , medicine , oceanography , geology , engineering

This paper reports a lithium phosphorus oxynitride (LiPON) thin-film electrolyte deposited using a metalorganic-chemical vapor deposition (MOCVD) method for 3D-structured micro batteries. It is shown that the MOCVD-LiPON film has both highly-conformal step coverage on a patterned substrate with line/space=2μm/2μm and aspect ratio=1 (51±3 nm) and high-ionic conductivity for very thin films deposited at 4.7 nm/min (5.9×10-6 S/cm for 190 nm and 5.3×10-6 S/cm for 95 nm). Detailed material characterization attributes the enhancement in ionic conductivity to a decrease in nanocrystallite size and improvement in chemical-composition uniformity in the film. In addition, electrochemical characterization of an all-solid-state thin-film battery fabricated with the 190 nm-thick LiPON film (Si substrate/Ti/Pt/LiCoO2/LiPON/a-Si:H/Cu) demonstrates that the LiPON film can successfully act as the electrolyte for lithium-ion batteries. Therefore, the MOCVD-LiPON film is a promising candidate material to realize 3D-structured micro batteries in the near future

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