Open AccessInvestigation of anomalous capacitance-voltage behavior caused by interface dipoles and the effect of post-metal-annealing
Author(s) -
Qifeng Lu,
Ce Zhao,
Chun Zhao,
S. Taylor,
Paul R. Chalker
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4999875
Subject(s) - annealing (glass) , capacitance , trapping , dipole , forming gas , materials science , zirconium , oxide , metal , nitrogen , analytical chemistry (journal) , dielectric , gate dielectric , electrode , condensed matter physics , voltage , chemistry , optoelectronics , electrical engineering , metallurgy , ecology , organic chemistry , chromatography , transistor , biology , engineering , physics
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