Open AccessThe study on the effect of pattern density distribution on the STI CMP process
Author(s) -
Yoon Myung Sub,
Bernard Yap Tzen Hian,
Lee It Fong,
Philip Menit Anak,
Ariffin Bin Minhar,
Tan Kim Wui,
Melvin Phua Twang Kim,
Looi Hui Jin,
Foo Thai Min
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4998394
Subject(s) - process (computing) , computer science , operating system
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