Open AccessParticle model of a cylindrical inductively coupled ion source
Author(s) -
N. Ippolito,
F. Taccogna,
P. Minelli,
M. Cavenago,
P. Veltri
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4995760
Subject(s) - robustness (evolution) , particle in cell , monte carlo method , computational physics , plasma , physics , computer science , grid , coupling (piping) , source code , radio frequency , nuclear engineering , materials science , nuclear physics , chemistry , engineering , mathematics , biochemistry , statistics , geometry , metallurgy , gene , telecommunications , operating system
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