Open AccessMulti-fluid simulation models for inductively coupled plasma sources
Author(s) -
Madhusudhan Kundrapu,
Seth Veitzer,
Peter Stoltz,
Kristian Beckwith,
Jonathan Smith
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4995707
Subject(s) - inductively coupled plasma , plasma , plasma modeling , computational physics , dielectric , diffusion , electric field , antenna (radio) , mechanics , physics , computer science , thermodynamics , optoelectronics , telecommunications , quantum mechanics
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