Planarized nanophotonic sensor for real-time fluid sensing | Zendy

Yazhao Liu | Zendy; H. W. M. Salemink | Zendy

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Planarized nanophotonic sensor for real-time fluid sensing

Author(s) -

Yazhao Liu,

H. W. M. Salemink

Publication year - 2017

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4993104

Subject(s) - nanophotonics , materials science , optoelectronics , photonic crystal , analyte , wavelength , optics , chemistry , physics

A planarized on-chip nanophotonic sensor based on a photonic crystal cavity is realized in this work. The sensor was embedded in a solid protecting material (flowable oxide) with perfect filled holes: this eliminates problems of fouling in practical applications. The functional area of the sensor is created by carefully removing the protecting material only on the top surface of the cavity. A wavelength shift of 7.5 nm was observed in experiment which is very close to a simulation result of 9.0 nm for sensing water (n=1.33) and crude oil (n=1.45) samples. Swift and accurate sensing was verified by a real-time dynamic measurement with rapidly alternating analytes in a microfluid channel.

Petroleum Engineerin

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