Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm | Zendy

Alberto Cagliani | Zendy; Frederik Westergaard Østerberg | Zendy; Ole Hansen | Zendy; Lior Shiv | Zendy; Peter F. Nielsen | Zendy; Dirch Hjorth Petersen | Zendy

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Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm

Author(s) -

Alberto Cagliani,

Frederik Westergaard Østerberg,

Ole Hansen,

Lior Shiv,

Peter F. Nielsen,

Dirch Hjorth Petersen

Publication year - 2017

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.4989994

Subject(s) - quantum tunnelling , metrology , position (finance) , tunnel magnetoresistance , reproducibility , magnetoresistance , algorithm , current (fluid) , accuracy and precision , computer science , point (geometry) , materials science , physics , optoelectronics , magnetic field , optics , nanotechnology , mathematics , statistics , finance , layer (electronics) , quantum mechanics , economics , geometry , thermodynamics

We present a breakthrough in micro-four-point probe (M4PP) metrology to substantially improve precision of transmission line (transfer length) type measurements by application of advanced electrode position correction. In particular, we demonstrate this methodology for the M4PP current-in-plane tunneling (CIPT) technique. The CIPT method has been a crucial tool in the development of magnetic tunnel junction (MTJ) stacks suitable for magnetic random-access memories for more than a decade. On two MTJ stacks, the measurement precision of resistance-area product and tunneling magnetoresistance was improved by up to a factor of 3.5 and the measurement reproducibility by up to a factor of 17, thanks to our improved position correction technique.

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