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δ-Doping of oxygen vacancies dictated by thermodynamics in epitaxial SrTiO3 films
Author(s) -
Fengmiao Li,
Fang Yang,
Yan Liang,
Shanming Li,
Zhenzhong Yang,
Qinghua Zhang,
Wentao Li,
Xuetao Zhu,
Lin Gu,
Jiandi Zhang,
E. W. Plummer,
Jiandong Guo
Publication year - 2017
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4985048
Subject(s) - molecular beam epitaxy , doping , epitaxy , oxygen , oxide , materials science , substrate (aquarium) , lattice (music) , chemical physics , condensed matter physics , thermodynamics , chemistry , nanotechnology , optoelectronics , metallurgy , physics , geology , oceanography , acoustics , organic chemistry , layer (electronics)
HomoepitaxialSrTiO3(110) film is grown by molecular beam epitaxy inultra-high vacuum with oxygen diffusing from substrate as the only oxidant. The resultedoxygen vacancies (VOs) are found to be spatially confinedwithin few subsurface layers only, forming a quasi-two-dimensional doped region with atunable high concentration. Such a δ-function distribution ofVOs is essentially determined by the thermodynamicsassociated with the surfacereconstruction, and facilitated by the relatively high growthtemperature. Our results demonstrate that it is feasible to tuneVOs distribution at the atomic scale by controlling thelattice structure of oxide surfaces

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