High-performance geometric phase elements in silica glass

High-precision three-dimensional ultrafast laser direct nanostructuring of silica glass resulting in multi-layered space-variant dielectric metasurfaces embedded in volume is demonstrated. Continuous phase profiles of nearly any optical component are achieved solely by the means of geometric phase. Complex designs of half-wave retarders with 90% transmission at 532 nm and >95% transmission at >1 μm, including polarization gratings with efficiency nearing 90% and computer generated holograms with a phase gradient of ∼0.8π rad/μm, were fabricated. A vortex half-wave retarder generating a single beam optical vortex with a tunable orbital angular momentum of up to ±100ℏ is shown. The high damage threshold of silica elements enables the simultaneous optical manipulation of a large number of micro-objects using high-power laser beams. Thus, the continuous control of torque without altering the intensity distribution was implemented in optical trapping demonstration with a total of 5 W average power, which is otherwise impossible with alternate beam shaping devices. In principle, the direct-write technique can be extended to any transparent material that supports laser assisted nanostructuring and can be effectively exploited for the integration of printed optics into multi-functional optoelectronic systems