Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators | Zendy

Nian Li | Zendy; Zhenghua Qian | Zendy; Jiashi Yang | Zendy

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Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators

Author(s) -

Nian Li,

Zhenghua Qian,

Jiashi Yang

Publication year - 2017

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4983890

Subject(s) - resonator , materials science , piezoelectricity , aspect ratio (aeronautics) , mode (computer interface) , acoustic impedance , acoustics , coupling (piping) , plane (geometry) , shear (geology) , composite material , physics , optoelectronics , ultrasonic sensor , geometry , computer science , mathematics , operating system

We studied mode couplings in thin film bulk acoustic wave resonators of a piezoelectric film on a dielectric layer operating with the fundamental thickness-extensional mode. A system of plate equations derived in our previous paper was used which includes the couplings to the unwanted in-plane extension, flexure, fundamental and second-order thickness shear modes. It was shown that the couplings depend strongly on the plate length/thickness ratio. For a relatively clean operating mode with weak couplings to unwanted modes, a series of discrete values of the plate length/thickness ratio should be avoided and these values were determined in the present paper. The results can be of great significance to the design and optimization of film bulk acoustic wave resonators

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