Open AccessDevelopment of radio-frequency heating-assisted nanoimprint with PETG solution for nanostructure-based biosensors
Author(s) -
TsungYeh Wu,
Hsuan-Yeh Hsu,
KuangLi Lee,
SenYeu Yang,
PeiKuen Wei
Publication year - 2017
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.4982699
Subject(s) - materials science , nanoimprint lithography , polyethylene terephthalate , biosensor , nanotechnology , optoelectronics , laser linewidth , nanostructure , nanorod , biochip , radio frequency , nanolithography , fabrication , composite material , optics , medicine , telecommunications , laser , alternative medicine , physics , pathology , computer science
We present radio-frequency (RF) heating-assisted nanoimprint lithography (NIL) for the rapid fabrication of nanostructured biochips. The chips were spin-coated using a RF-sensitive polymer film, namely polyethylene terephthalate glycol-modified (PETG). The RF heating process takes advantage of rapid temperature increases and cooling for NIL. Using a patterned nickel film as the mold, various nanostructures, such as nanowire, nanorod, and nanogrid arrays, were successfully fabricated within several seconds. For surface plasmon biosensing chips, the silver-coated nanowire arrays achieved a linewidth of 6.01 nm and wavelength sensitivity of 550 nm per refractive index unit. The functionality of the sensor was verified by observing the label-free antigen–antibody interactions
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