Open AccessInterplay between deoxidation and dewetting for ultrathin SOI films
Author(s) -
M. Trautmann,
Fabien Cheynis,
Frédéric Leroy,
Stefano Curiotto,
Pierre Müller
Publication year - 2017
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4980132
Subject(s) - dewetting , materials science , breakup , nanotechnology , coalescence (physics) , silicon , oxide , thin film , nanodot , optoelectronics , metallurgy , psychology , physics , astrobiology , psychoanalysis
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