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Research Update: Enhancement of figure of merit for energy-harvesters based on free-standing epitaxial Pb(Zr0.52Ti0.48)0.99Nb0.01O3 thin-film cantilevers
Author(s) -
Minh D. Nguyen,
Evert Pieter Houwman,
Matthijn Dekkers,
Darrell G. Schlom,
Guus Rijnders
Publication year - 2017
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.4978273
Subject(s) - piezoelectricity , materials science , figure of merit , hysteresis , cantilever , piezoelectric coefficient , ferroelectricity , dielectric , epitaxy , condensed matter physics , optoelectronics , biasing , energy harvesting , thin film , energy (signal processing) , voltage , nanotechnology , composite material , electrical engineering , physics , engineering , layer (electronics) , quantum mechanics
All-oxide free-standing cantilevers were fabricated with epitaxial (001)-oriented Pb(Zr0.52Ti0.48)O3 (PZT) and Pb(Zr0.52Ti0.48)0.99Nb0.01O3 (PNZT) as piezoelectric layers and SrRuO3 electrodes. The ferroelectric and piezoelectric hysteresis loops were measured. From the zero-bias values, the figure-of-merits (FOMs) for piezoelectric energy harvesting systems were calculated. For the PNZT cantilever, an extremely large value FOM = 55 GPa was obtained. This very high value is due to the large shifts of the hysteresis loops such that the zero-bias piezoelectric coefficient e31f is maximum and the zero-bias dielectric constant is strongly reduced compared to the value in the undoped PZT device. The results show that by engineering the self-bias field the energy-harvesting properties of piezoelectric systems can be increased significantly

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