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Low vibration laboratory with a single-stage vibration isolation for microscopy applications
Author(s) -
Bert Voigtländer,
Peter Coenen,
Vasily Cherepanov,
Peter Borgens,
Thomas Duden,
F. Stefan Tautz
Publication year - 2017
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4975832
Subject(s) - vibration isolation , vibration , acceleration , spring (device) , acoustics , materials science , ton , isolation (microbiology) , mechanical engineering , physics , engineering , biology , microbiology and biotechnology , classical mechanics , fishery
The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept

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