Open AccessRotatable Offner imaging system for ellipsometric measurement
Author(s) -
Lianhua Jin,
Takumi Tanaka,
Eiichi Kondoh,
Bernard Gelloz,
Kazuo Sano,
Isao Fujio,
Yoshitaka Kajiyama,
Makoto Uehara
Publication year - 2017
Publication title -
review of scientific instruments
Language(s) - Danish
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4973778
Subject(s) - optics , ellipsometry , magnification , resolution (logic) , image resolution , wafer , materials science , focus (optics) , substrate (aquarium) , physics , optoelectronics , nanotechnology , thin film , computer science , oceanography , artificial intelligence , geology
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