Open AccessSurface adhesion study of La2O3 thin film on Si and glass substrate for micro-flexography printing
Author(s) -
Suhaimi Hassan,
Mohd Sallehuddin Yusof,
Zaidi Embong,
M.I. Maksud
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4972930
Subject(s) - materials science , substrate (aquarium) , wafer , x ray photoelectron spectroscopy , sputter deposition , oxide , thin film , lanthanum , sputtering , nanotechnology , optoelectronics , chemical engineering , metallurgy , chemistry , inorganic chemistry , oceanography , geology , engineering
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