Open AccessEffect of gas on the structural and electrical properties of titanium dioxide film
Author(s) -
Muhammad Rahim,
Mohd Zainizan Sahdan,
Anis Suhaili Bakri,
N. D. M. Said,
Sami Yunus,
Jais Lias
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4968387
Subject(s) - annealing (glass) , materials science , chemical vapor deposition , electrical resistivity and conductivity , surface roughness , titanium dioxide , argon , thin film , anatase , titanium , surface finish , forming gas , chemical engineering , analytical chemistry (journal) , composite material , metallurgy , nanotechnology , chemistry , photocatalysis , biochemistry , engineering , organic chemistry , chromatography , electrical engineering , catalysis
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