Open AccessComparative study between chemical and atmospheric pressure plasma jet cleaning on glass substrate
Author(s) -
Rizan Rizon Elfa,
Mohd Khairul Ahmad,
Chin Fhong Soon,
Mohd Zainizan Sahdan,
Nafarizal Nayan
Publication year - 2017
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4968366
Subject(s) - substrate (aquarium) , atmospheric pressure plasma , plasma cleaning , materials science , plasma , jet (fluid) , atmospheric pressure , argon , contact angle , chemical engineering , composite material , chemistry , aerospace engineering , meteorology , oceanography , physics , organic chemistry , quantum mechanics , engineering , geology
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