Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation | Zendy

D. S. Kuznetsov | Zendy; Andrey Yakshin | Zendy; Jacobus Marinus Sturm | Zendy; Robbert Wilhelmus Elisabeth van de Kruijs | Zendy; F. Bijkerk | Zendy

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Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

Author(s) -

D. S. Kuznetsov,

Andrey Yakshin,

Jacobus Marinus Sturm,

Robbert Wilhelmus Elisabeth van de Kruijs,

F. Bijkerk

Publication year - 2016

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4968175

Subject(s) - passivation , materials science , deposition (geology) , stoichiometry , reflectivity , optoelectronics , thin film , degradation (telecommunications) , wavelength , optics , layer (electronics) , nanotechnology , chemistry , electronic engineering , physics , paleontology , engineering , sediment , biology

We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay

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