Scaling laws of nanorods in two-photon polymerization nanofabrication using a continuous scanning method | Zendy

Jieqiong Lin | Zendy; Xian Jing | Zendy; Xiaoqin Zhou | Zendy; Xu Zheng | Zendy; Rui Gao | Zendy; Yibo Wang | Zendy

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Scaling laws of nanorods in two-photon polymerization nanofabrication using a continuous scanning method

Author(s) -

Jieqiong Lin,

Xian Jing,

Xiaoqin Zhou,

Xu Zheng,

Rui Gao,

Yibo Wang

Publication year - 2016

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4966913

Subject(s) - nanorod , nanolithography , photoresist , materials science , scaling , optics , polymerization , nanotechnology , physics , composite material , geometry , polymer , medicine , alternative medicine , mathematics , pathology , fabrication , layer (electronics)

We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free radicals concentration, lateral and vertical size models were established by transforming the continuously changing photon intensity to an equivalent constant value. A transformational relationship of voxels and nanorods with a same lateral size is deduced to validate the proposed models. In the experiment, voxels were obtained by an ascending scan method while nanorods were fabricated by a cantilever method. The experimental data shows a good agreement with predicted data

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