Open AccessThe impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films
Author(s) -
Fedor F. Klimashin,
Nikola Koutná,
Holger Euchner,
David Holec,
P.H. Mayrhofer
Publication year - 2016
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4966664
Subject(s) - stoichiometry , nitrogen , metastability , vapour deposition , materials science , deposition (geology) , phase (matter) , thin film , analytical chemistry (journal) , crystallography , chemistry , nanotechnology , organic chemistry , paleontology , chromatography , sediment , biology
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