Open AccessComment on “Thickness and temperature depending intermixing of SiOx/SiO2 and SiOxNy/SiO2 superlattices: Experimental observation and thermodynamic modeling” [Appl. Phys. Lett. 108, 223102 (2016)]
Author(s) -
Daniel Hiller,
J. Laube,
Sebastian Gutsch,
Margit Zacharias
Publication year - 2016
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4965722
Subject(s) - superlattice , condensed matter physics , materials science , thermodynamics , physics
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