A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms | Zendy

Dongyang Chen | Zendy; Jiuxuan Zhao | Zendy; Zhonggui Xu | Zendy; Jin Xie | Zendy

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A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms

Author(s) -

Dongyang Chen,

Jiuxuan Zhao,

Zhonggui Xu,

Jin Xie

Publication year - 2016

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4965253

Subject(s) - resonator , tuning fork , sensitivity (control systems) , leverage (statistics) , microelectromechanical systems , materials science , optoelectronics , physics , electronic engineering , acoustics , engineering , computer science , vibration , machine learning

This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The sensor comprises two symmetrically-distributed double-ended tuning fork (DETF) resonators, each of which connects with dual micro-leverage mechanisms. The micro-leverages amplify electrostatic force in opposite directions and cause differential frequency shift of the two resonators. Both the resonators show a similar trend in behaviors of electrical and mechanical nonlinearity. Effect of environment disturbance is suppressed by the differential sensing scheme. The measured sensitivity of the two resonators are 3.31×10-4 Hz/fC2 and 1.85×10-4 Hz/fC2 respectively, and an overall sensitivity for the resonant charge sensor is 5.16×10-4 Hz/fC2

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