Interplay between relaxation and Sn segregation during thermal annealing of GeSn strained layers
Author(s) -
C.M. Comrie,
C. Mtshali,
P. Sechogela,
Nuno M. Santos,
K. van Stiphout,
Roger Loo,
Wilfried Vandervorst,
A. Vantomme
Publication year - 2016
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4964692
Subject(s) - rutherford backscattering spectrometry , channelling , annealing (glass) , materials science , epitaxy , stress relaxation , diffraction , wafer , crystallography , lattice (music) , analytical chemistry (journal) , relaxation (psychology) , condensed matter physics , thin film , chemistry , layer (electronics) , optoelectronics , optics , nanotechnology , metallurgy , ion , social psychology , psychology , creep , physics , organic chemistry , chromatography , acoustics
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