A theoretical model and analysis of composite membrane of a piezoresistive pressure sensor | Zendy

Meng Nie | Zendy; Hongquan Bao | Zendy

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A theoretical model and analysis of composite membrane of a piezoresistive pressure sensor

Author(s) -

Meng Nie,

Hongquan Bao

Publication year - 2016

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4964661

Subject(s) - piezoresistive effect , pressure sensor , dimension (graph theory) , materials science , membrane , composite number , mechanical engineering , electronic engineering , composite material , optoelectronics , computer science , acoustics , engineering , physics , chemistry , mathematics , pure mathematics , biochemistry

In this paper, an analytical model of the composite membrane piezoresistive pressure sensor with the testing structure is established, which built the relationship between the electrostatic force and the material properties, dimension parameters of the sensor. By using the theoretical model of the sensor, it is easily to analyze the sensor’s performance, to optimize the dimension of the sensor, and to make the step of calibrating to be getting fast and accurate

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