Open AccessDevelopment of array-type atmospheric-pressure RF plasma generator with electric on–off control for high-throughput numerically controlled processes
Author(s) -
Hiroyasu Takei,
Satoshi Kurio,
Satoshi Matsuyama,
Kazuto Yamauchi,
Yasuhisa Sano
Publication year - 2016
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/1.4964656
Subject(s) - materials science , mosfet , wafer , capacitance , electrode , optoelectronics , transistor , atmospheric pressure , plasma , parasitic capacitance , radio frequency , electronic circuit , electrical engineering , voltage , physics , quantum mechanics , meteorology , engineering
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