Open AccessElectron beam evaporation of alumina ceramics at forevacuum pressure range
Author(s) -
A. S. Klimov,
A A Zenin,
Yu. G. Yushkov,
Е. М. Oks
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4964562
Subject(s) - ceramic , evaporation , materials science , electron beam physical vapor deposition , cathode ray , electron beam processing , range (aeronautics) , electron beam induced deposition , electron , atomic physics , composite material , thin film , scanning electron microscope , nanotechnology , physics , nuclear physics , scanning transmission electron microscopy , thermodynamics
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