Open AccessElectron beam deposition of ceramic coatings at fore-vacuum pressure
Author(s) -
A.V. Tyunkov,
Yu. G. Yushkov,
D.B. Zolotukhin,
Е. М. Oks
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4964561
Subject(s) - materials science , cathode , electron beam physical vapor deposition , ceramic , evaporation , electron beam induced deposition , coating , cathode ray , ion beam deposition , beam (structure) , ion beam , deposition (geology) , plasma , vacuum chamber , electron , thin film , composite material , scanning electron microscope , optics , nanotechnology , chemistry , physics , thermodynamics , paleontology , scanning transmission electron microscopy , sediment , biology , quantum mechanics
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