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MgB2 ultrathin films fabricated by hybrid physical chemical vapor deposition and ion milling
Author(s) -
Narendra Acharya,
Matthäus A. Wolak,
Teng Tan,
Namhoon Lee,
Andrew C. Lang,
Mitra L. Taheri,
Dan Cunnane,
Boris S. Karasik,
X. X. Xi
Publication year - 2016
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.4961635
Subject(s) - materials science , chemical vapor deposition , superconductivity , physical vapor deposition , deposition (geology) , thin film , ion milling machine , ion , hybrid physical chemical vapor deposition , chemical engineering , nanotechnology , combustion chemical vapor deposition , analytical chemistry (journal) , carbon film , condensed matter physics , layer (electronics) , paleontology , chemistry , physics , quantum mechanics , chromatography , sediment , engineering , biology
In this letter, we report on the structural and transport measurements of ultrathin MgB2 films grown by hybrid physical-chemical vapor deposition followed by low incident angle Ar ion milling. The ultrathin films as thin as 1.8 nm, or 6 unit cells, exhibit excellent superconducting properties such as high critical temperature (Tc) and high critical current density (Jc). The results show the great potential of these ultrathin films for superconducting devices and present a possibility to explore superconductivity in MgB2 at the 2D limit

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