Templated growth of diamond optical resonators via plasma-enhanced chemical vapor deposition | Zendy

Xue Zhang | Zendy; Evelyn L. Hu | Zendy

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Templated growth of diamond optical resonators via plasma-enhanced chemical vapor deposition

Author(s) -

Xue Zhang,

Evelyn L. Hu

Publication year - 2016

Publication title -

applied physics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.182

H-Index - 442

eISSN - 1077-3118

pISSN - 0003-6951

DOI - 10.1063/1.4961536

Subject(s) - chemical vapor deposition , diamond , materials science , photoluminescence , optoelectronics , vacancy defect , luminescence , fabrication , silicon , refractive index , resonator , isotropic etching , etching (microfabrication) , nanotechnology , chemistry , crystallography , layer (electronics) , medicine , alternative medicine , pathology , composite material

We utilize plasma-enhanced chemical vapor deposition through a patterned silica mask for templated diamond growth to create optical resonators. The pyramid-shaped structures have quality factors Q up to 600, measured using confocal photoluminescence spectroscopy, and mode volumes V as small as 2.5(λ/n)3 for resonances at wavelengths λ between 550 and 650 nm, and refractive index n, obtained using finite-difference time-domain simulations. Bright luminescence from nitrogen-vacancy and silicon-vacancy centers in the grown diamond is observed. The resonator design and fabrication technique obviates any etching of diamond, which preserves emitter properties in a pristine host lattice.

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