Open AccessX-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching
Author(s) -
Dmitriy L. Voronov,
Paul Lum,
Patrick Naulleau,
Eric M. Gullikson,
А. В. Федоров,
H. A. Padmore
Publication year - 2016
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4960203
Subject(s) - materials science , optics , etching (microfabrication) , wavelength , diffraction grating , diffraction , optoelectronics , grating , diffraction efficiency , laser , silicon , anisotropy , physics , nanotechnology , layer (electronics)
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