Open AccessX-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching
Author(s) -
Dmitriy L. Voronov,
Paul Lum,
Patrick Naulleau,
Eric M. Gullikson,
A. V. Fedorov,
H. A. Padmore
Publication year - 2016
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.4960203
Subject(s) - optics , materials science , wavelength , diffraction , etching (microfabrication) , diffraction grating , laser , optoelectronics , grating , diffraction efficiency , anisotropy , physics , nanotechnology , layer (electronics)