Open AccessStructure determination of a multilayer with an island-like overlayer using hard x-ray photoelectron spectroscopy
Author(s) -
Noritake Isomura,
Keita Kataoka,
Kayo Horibuchi,
Kazuhiko Dohmae,
Hiroshi Oji,
YiTao Cui,
Jiyoung Son,
Kosuke Kitazumi,
N. Takahashi,
Yasuji Kimoto
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4952935
Subject(s) - overlayer , x ray photoelectron spectroscopy , materials science , substrate (aquarium) , layer (electronics) , surface roughness , analytical chemistry (journal) , optics , atomic physics , molecular physics , physics , chemistry , condensed matter physics , nuclear magnetic resonance , nanotechnology , geology , composite material , oceanography , chromatography
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