Open AccessA new UHV micro positioning system for high load
Author(s) -
Carles Colldelram,
Josep Nicolás,
L. Nikitina
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4952847
Subject(s) - actuator , mechanical engineering , bellows , rotary actuator , ball screw , comb drive , backlash , torque , feedthrough , acoustics , engineering , electrical engineering , physics , fabrication , thermodynamics , nut , medicine , alternative medicine , pathology
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