Open AccessElectrical and electroluminescent characterization of nanometric multilayers of SiOX/SiOY obtained by LPCVD including non-normal emission
Author(s) -
J. Alarcón-Salazar,
I. E. Zaldívar-Huerta,
M. AcevesMijares
Publication year - 2016
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.4952730
Subject(s) - electroluminescence , materials science , silicon , chemical vapor deposition , analytical chemistry (journal) , optoelectronics , photoluminescence , light emission , dielectric , nanotechnology , chemistry , layer (electronics) , chromatography
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