Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope | Zendy

Lina Marcela Diaz Santamaria | Zendy; Cesar E. GarciaOrtiz | Zendy; Héctor R. Siller | Zendy; R. Cortés | Zendy; Víctor Coello | Zendy

Open Access

Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope

Author(s) -

Lina Marcela Diaz Santamaria,

Cesar E. GarciaOrtiz,

Héctor R. Siller,

R. Cortés,

Víctor Coello

Publication year - 2016

Publication title -

aip advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.421

H-Index - 58

ISSN - 2158-3226

DOI - 10.1063/1.4947114

Subject(s) - interferometry , microscope , optics , optical microscope , sample (material) , displacement (psychology) , near field optics , materials science , near field scanning optical microscope , scanning probe microscopy , physics , scanning electron microscope , psychology , psychotherapist , thermodynamics

In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm

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