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The effect of additional element on compositionally modulated atomic layered structure of hexagonal Co80Pt20 alloy films with superlattice diffraction was investigated. In this study it is found that the addition of Cr or W element to Co80Pt20 alloy film shows less deterioration of hcp stacking structure and compositionally modulated atomic layer stacking structure as compared to Si or Zr or Ti with Ku of around 1.4 or 1.0 × 107 erg/cm3 at 5 at.% addition. Furthermore, for O2 addition of O2 ≥ 5.0 × 10−3 Pa to CoPt alloy, compositionally modulated atomic layer stacking structure will be deteriorated with enhancement of formation of hcp stacking structure which leads higher Ku of 1.0 × 107 erg/cm3

Effect of additional elements on compositional modulated atomic layered structure of hexagonal Co80Pt20 alloy films with superlattice diffraction