Open AccessDevelopment of aerosol assisted chemical vapor deposition for thin film fabrication
Author(s) -
Dwindra Wilham Maulana,
Dian Marthatika,
Camellia Panatarani,
Jajat Yuda Mindara,
I Made Joni
Publication year - 2016
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.4941867
Subject(s) - materials science , chemical vapor deposition , thin film , aerosol , boiling point , volumetric flow rate , substrate (aquarium) , composite material , chemical engineering , deposition (geology) , optoelectronics , analytical chemistry (journal) , nanotechnology , chemistry , paleontology , physics , oceanography , organic chemistry , chromatography , quantum mechanics , sediment , geology , engineering , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom